C-V characterization of bonded Si/SiO2/Si structures

被引：0
|
作者：
Huang, Qingan [1 ]
Chen, Junning [1 ]
Zhang, Huizhen [1 ]
Tong, Qinyi [1 ]
机构：
[1] Southeast Univ, Nanjing, China
来源：
Pan Tao Ti Hsueh Pao/Chinese Journal of Semiconductors | 1994年 / 15卷 / 05期
关键词：
9;
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摘要：
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页码：354 / 360
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