New type of sensor structure for position detection

被引：0
|
作者：
Siess, Gunter
Roeder, Ralf
机构：
[1] MAZet Anwendungszentrum Thuringen L., Germany
[2] Karls-Universität, Prag, Germany
[3] MAZeT
来源：
F and M; Feinwerktechnik, Mikrotechnik, Messtechnik | 1998年 / 106卷 / 1-2期
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摘要：
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页码：66 / 68
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