Molecular dynamics study of sputtering of Cu(111) under Ar ion bombardment

被引：0
|
作者：
Betz, G. [1 ]
Kirchner, R. [1 ]
Husinsky, W. [1 ]
Ruedenauer, F. [1 ]
Urbassek, H.M. [1 ]
机构：
[1] Technische Universitat Wien, Vienna, Austria
来源：
Radiation Effects and Defects in Solids | 1994年 / 130-31卷
关键词：
51;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：251 / 266
相关论文
共 50 条
  • [21] Sputtering and transformation of surfaces under ion bombardment
    Urazgildin, IF
    IZVESTIYA AKADEMII NAUK SERIYA FIZICHESKAYA, 1996, 60 (07): : 20 - 43
  • [22] PREFERENTIAL SPUTTERING OF TIC UNDER KEV AR+ION BOMBARDMENT - SIMULTANEOUS SPUTTERING ISS MEASUREMENT WITH HE+ AND AR+ IONS
    KANG, HJ
    MATSUDA, Y
    SHIMIZU, R
    SURFACE SCIENCE, 1983, 134 (01) : L500 - L504
  • [23] Molecular dynamics study on Ar ion bombardment effects in amorphous SiO2 deposition processes
    Taguchi, Masafumi
    Hamaguchi, Satoshi
    Journal of Applied Physics, 2006, 100 (12):
  • [24] Molecular dynamics study on Ar ion bombardment effects in amorphous SiO2 deposition processes
    Taguchi, Masafumi
    Hamaguchi, Satoshi
    JOURNAL OF APPLIED PHYSICS, 2006, 100 (12)
  • [25] Molecular dynamics simulation of Mo sputtering by the Ar gas cluster ion beam
    Nazarov, A.V.
    Zavilgelskiy, A.D.
    Applied Physics, 2019, (05): : 60 - 64
  • [26] Influence of Ar plus Energy of bombardment Cu target and Low Energy assisted Bombardment on Cu-W Thin Film Structure by Ion Beam Sputtering
    Ai, Yong-ping
    Zeng, Ying-ying
    Liu, Li-jun
    Huang, Xiao-ming
    Zhou, Tai-ping
    ADVANCED MATERIALS AND COMPUTER SCIENCE, PTS 1-3, 2011, 474-476 : 448 - 453
  • [27] Low energy Ar+ bombardment of GaN surfaces: A statistical study of ion reflection and sputtering
    Despiau-Pujo, Emilie
    Chabert, Pascal
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2010, 28 (05): : 1263 - 1268
  • [28] RHEED AND REM STUDY OF Si(111) SURFACE DEGRADATION UNDER Ar BOMBARDMENT.
    Claverie, A.
    Faure, J.
    Vieu, C.
    Beauvillain, J.
    Jouffrey, B.
    1805, (47):
  • [29] Sputtering of W Mo alloy under ion bombardment
    Li Chengming(李成明)
    Transactions of Nonferrous Metals Society of China, 1999, (03) : 629 - 633
  • [30] Molecular dynamics simulations of temperature effect on tungsten sputtering yields under helium bombardment
    Meng, QingLing
    Niu, LiangLiang
    Zhang, Ying
    Lu, GuangHong
    SCIENCE CHINA-PHYSICS MECHANICS & ASTRONOMY, 2018, 61 (01)
12345