Metal Coating of Substrates by Magnetron Sputtering.

被引：0
|
作者：
Muenz, Wolf Dieter
机构：
来源：
Elektronik Produktion & Prueftechnik | 1980年 / 12期
关键词：
Compendex;
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学科分类号：
摘要：
METALS AND ALLOYS
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页码：591 / 593
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