Humidity sensing properties of spin-on phosphorosilica thin films

被引：0
|
作者：
Waczynski, K. [1 ]
Wrobel, E. [1 ]
Pruszowski, Z. [1 ]
Nowak, R. [1 ]
机构：
[1] Silesian Technical Univ, Gliwice, Poland
来源：
Electron Technology (Warsaw) | 2000年 / 33卷 / 01期
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D O I：
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摘要：
18
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页码：217 / 221
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