Studies of jet configurations for jet-enhanced sputtering devices

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作者：
Kim, Hyo J.
Park, Yang S.
Cho, Jung H.
Lee, Gae H.
Cho, Kyu H.
Lee, Kee B.
Kim, Ha S.
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Journal of Analytical Atomic Spectrometry | 1995年 / 10卷 / 04期
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