Plasma etching with self-assembled monolayer masks for nanostructure fabrication

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Lercel, M.J.
Craighead, H.G.
Parikh, A.N.
Seshadri, K.
Allara, D.L.
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Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films | 1996年 / 14卷 / 3 pt 2期
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