Nanoscale patterning of an organosilane monolayer on the basis of tip-induced electrochemistry in atomic force microscopy

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Sugimura, Hiroyuki
Okiguchi, Keiko
Nakagiri, Nobuyuki
Miyashita, Masayuki
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Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena | 1996年 / 14卷 / 06期
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