Laser-produced plasma soft X-ray source for 13nm projection lithography

被引：0
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作者：
Lin, Jingquan [1 ]
Ni, Qiliang [1 ]
Chen, Bo [1 ]
Cao, Jianlin [1 ]
机构：
[1] Changchun Inst of Optics and Fine, Mechanics, Chinese Acad of Sciences, Changchun, China
来源：
Weixi Jiagong Jishu/Microfabrication Technology | 1997年 / 04期
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(Edited Abstract)
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页码：8 / 11
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