Simultaneous three-dimensional step-height measurement and high-resolution tomographic imaging with a spectral interferometric microscope

被引：0

作者：

Mehta, Dalip Singh ^{[1
]}

Sugai, Masaya ^{[1
]}

Hinosugi, Hideki ^{[1
]}

Saito, Shohei ^{[1
]}

Takeda, Mitsuo ^{[1
]}

Kurokawa, Takashi ^{[1
]}

Takahashi, Hideki ^{[1
]}

Ando, Masahito ^{[1
]}

Shishido, Masataka ^{[1
]}

Yoshizawa, Tetsuo ^{[1
]}

机构：

[1] University of Electro-Communications, 1-5-1 Chofugaoka, Chofu, Tokyo 182-8585, Japan

来源：

Applied Optics | 2002年 / 41卷 / 19期

关键词：

Frequency-scanning devices - Superluminescent diodes (SLD);

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

页码：3874 / 3885

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