Effects of oxygen and substrate temperature on properties of amorphous carbon films fabricated by plasma-assisted pulsed laser deposition method

被引：0
|
作者：
Ono, Tomoyuki [1 ]
Suda, Yoshiyuki [1 ]
Akazawa, Masamichi [2 ]
Sakai, Yosuke [1 ]
Suzuki, Kaoru [2 ]
机构：
[1] Graduate School of Engineering, Hokkaido University, North 13 West 8, Sapporo 060-8628, Japan
[2] Department of Electrical Engineering, College of Science and Technology, Nihon University, Tokyo 101-8308, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2002年 / 41卷 / 7 A期
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摘要：
15
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页码：4651 / 4654
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