Characterization of surfaces and thin layers by analytic beams

被引：0
|
作者：
Wetzig, Klaus [1 ]
机构：
[1] TU Dresden, Germany
来源：
MO Metalloberflache Beschichten von Metall und Kunststoff | 1993年 / 47卷 / 11期
关键词：
Microstructure - Optical variables measurement - Surfaces - Thin films;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
A survey is provided on modern methods of surface and thin-layer analyses which are based on the use of electron and ion beams as well as X-rays. The methods discussed concern the examination of the microstructure, of phase structure, of internal stresses and of the concentration of elements. The benefits and boundaries of different methods are discussed, and their efficiency is demonstrated a current examples of thin-layer research.
引用
收藏
页码：562 / 569
相关论文
共 50 条
  • [1] Applications of fullerene beams in analysis of thin layers
    Czerwinski, B.
    Rzeznik, L.
    Stachura, K.
    Paruch, R.
    Garrison, B. J.
    Postawa, Z.
    VACUUM, 2008, 82 (10) : 1120 - 1123
  • [2] CHARACTERIZATION OF THIN-FILMS AND METAL-SURFACES USING ION-BEAMS
    WINOGRAD, N
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1995, 210 : 1 - ANYL
  • [3] CHARACTERIZATION OF SURFACES AND THIN-LAYERS BY GRAZING-INCIDENCE X-RAYS
    BRUNEL, M
    ANNALES DE CHIMIE-SCIENCE DES MATERIAUX, 1994, 19 (7-8): : 415 - 420
  • [4] Structuring thin films and surfaces by ion beams
    Lieb, KP
    Bolse, W
    Dhar, S
    Habenicht, S
    Neubauer, M
    Roccaforte, F
    Uhrmacher, M
    19TH SPIG: PHYSICS OF IONIZED GASES: INVITED LECTURES, TOPICAL INVITED LECTURES AND PROGRESS REPORTS, 1999, : 209 - 224
  • [5] GROWTH OF THIN SILICON LAYERS ON NIOBIUM SURFACES
    AFANASEVA, EY
    POTEKHINA, ND
    SOLOVEV, SM
    FIZIKA TVERDOGO TELA, 1995, 37 (02): : 463 - 474
  • [6] Electron scanner of the structure of surfaces and thin layers
    Knoll, M.
    Theile, R.
    ZEITSCHRIFT FUR PHYSIK, 1939, 113 (3-4): : 260 - 280
  • [7] Adhesion of thin metallic layers on Au surfaces
    Zotti, Linda A.
    O'Regan, David D.
    JOURNAL OF PHYSICS-CONDENSED MATTER, 2022, 34 (27)
  • [8] On the reflectivity of surfaces with thin transition or contaminated layers
    Fechtchenko, RM
    Popov, AV
    Vinogradov, AV
    JOURNAL OF RUSSIAN LASER RESEARCH, 2000, 21 (01) : 62 - 68
  • [9] On the reflectivity of surfaces with thin transition or contaminated layers
    R. M. Fechtchenko
    A. V. Popov
    A. V. Vinogradov
    Journal of Russian Laser Research, 2000, 21 : 62 - 68
  • [10] Electronically induced modification of thin layers on surfaces
    Bauer, U.
    Neppl, S.
    Menzel, D.
    Feulner, P.
    Shaporenko, A.
    Zharnikov, M.
    LOW TEMPERATURE PHYSICS, 2007, 33 (6-7) : 511 - 518
12345