Bias effect on compositional separation in sputtered Co-Cr films

被引：0

作者：

Takei, Koji ^{[1
]}

Rogers, David J. ^{[1
]}

Maeda, Yasushi ^{[1
]}

机构：

[1] NTT Interdisciplinary Research Lab, Ibaraki, Japan

来源：

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 1994年 / 33卷 / 10期

关键词：

17;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

页码：5739 / 5742

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[31] SURFACE CHEMICAL-STATE OF SPUTTERED CO-CR FILMS
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