Reactive ion etching of diamond films

被引：0
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作者：
Yao, Xiang
Shen, Hesheng
Ding, Guifu
Zhu, Jun
Zhang, Zhiming
Zhang, Shoubai
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来源：
Weixi Jiagong Jishu/Microfabrication Technology | 2000年 / 03期
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页码：23 / 28
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