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- [3] REACTIVE ION ETCHING OF DIAMOND AND DIAMOND-LIKE CARBON-FILMSDIAMOND AND RELATED MATERIALS, 1994, 3 (4-6) : 645 - 649VIVENSANG, CTURBAN, GANGER, EGICQUEL, A
- [4] Patterning and reactive ion etching of diamond films using light coupling masksNANOENGINEERED ASSEMBLIES AND ADVANCED MICRO/NANOSYSTEMS, 2004, 820 : 325 - 330Leech, PWReeves, GKHolland, AS
- [5] Diamond waveguides fabricated by reactive ion etchingOPTICS EXPRESS, 2008, 16 (24) : 19512 - 19519Hiscocks, Mark P.Ganesan, KumaraveluGibson, Brant C.Huntington, Shane T.Ladouceur, FrancoisPrawer, Steven
- [6] DEEP REACTIVE ION ETCHING OF SYNTHETIC DIAMONDIZVESTIYA VYSSHIKH UCHEBNYKH ZAVEDENII KHIMIYA I KHIMICHESKAYA TEKHNOLOGIYA, 2014, 57 (05): : 4 - +Bormashov, V. S.Golovanov, A. V.Volkov, A. P.Tarelkin, S. A.Buga, S. G.Blank, V. D.
- [7] Reactive ion etching of waveguide structures in diamondDIAMOND AND RELATED MATERIALS, 2008, 17 (11) : 1831 - 1834Hiscocks, Mark P.Kaalund, Christopher J.Ladouceur, FrancoisHuntington, Shane T.Gibson, Brant C.Trpkovski, StevenSimpson, DavidAmpem-Lassen, EricPrawer, StevenButlerc, James E.
- [8] Effects at reactive ion etching of CVD diamondTHIN SOLID FILMS, 2000, 368 (02) : 222 - 226Bello, IFung, MKZhang, WJLai, KKWang, YMZhou, ZFYu, RKWLee, CSLee, ST
- [9] REACTIVE ION ETCHING OF ORGANIC FILMSJOURNAL OF ELECTRONIC MATERIALS, 1979, 8 (05) : 728 - 728ROTHMAN, LBSCHOPEN, TJSCHWARTZ, GC
- [10] Deposition and Patterning of Polycrystalline Diamond Films Using Traditional Photolithography and Reactive Ion EtchingCOATINGS, 2017, 7 (09):Linnik, StepanOkhotnikov, VitaliiGaydaychuk, Alexander