USE OF AMORPHOUS SILICON FILMS AS SENSORS.

被引：0

作者：

Koike, Ryutaro ^{[1
]}

Kodato, Setsuo ^{[1
]}

机构：

[1] Anritus Corp, Atsugi, Jpn, Anritus Corp, Atsugi, Jpn

来源：

Sensors and actuators | 1988年 / 13卷 / 01期

关键词：

D O I：

暂无

中图分类号：

学科分类号：

摘要：

SENSORS

引用

页码：11 / 27

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