Structural transformations and defect production in ion implanted silicon: a molecular dynamics simulation study

被引：0
|
作者：
de, la Rubia, T. Diaz
Gilmer, G.H.
机构：
来源：
Physical Review Letters | 1995年 / 74卷 / 13期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [41] DISORDER PRODUCTION IN ION-IMPLANTED SILICON
    KERKOW, H
    LUKASCH, B
    PIPPIG, R
    PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1982, 70 (02): : 489 - 495
  • [42] The role of the bond defect on silicon amorphization:: a molecular dynamics study
    Marqués, LA
    Pelaz, L
    Aboy, M
    Vicente, J
    Barbolla, J
    COMPUTATIONAL MATERIALS SCIENCE, 2003, 27 (1-2) : 6 - 9
  • [43] Implantation angle dependent study of vacancy related defect profiles in ion implanted silicon
    Lay, MDH
    McCallum, JC
    Jagadish, C
    PHYSICA B-CONDENSED MATTER, 2003, 340 : 748 - 751
  • [44] Photoluminescence study of 1018 meV defect lines from ion-implanted silicon
    Lee, H
    Choi, SH
    Seong, E
    Kim, SM
    JOURNAL OF THE KOREAN PHYSICAL SOCIETY, 1999, 34 : S295 - S298
  • [45] ON THE NATURE OF THE DEFECT REVERSE ANNEALING IN ION-IMPLANTED SILICON
    DVURECHENSKY, AV
    RYAZANTSEV, IA
    RADIATION EFFECTS AND DEFECTS IN SOLIDS, 1980, 46 (3-4): : 129 - 132
  • [46] ORIENTATION-DEPENDENT DEFECT IN ION-IMPLANTED SILICON
    LEE, YH
    BROSIOUS, PR
    CORBETT, JW
    PHYSICS LETTERS A, 1974, A 49 (06) : 425 - 426
  • [47] Comment on "Amorphization and defect recombination in ion implanted silicon carbide"
    Heera, V
    JOURNAL OF APPLIED PHYSICS, 1998, 83 (07) : 3935 - 3936
  • [48] Point defect accumulation in silicon irradiated by energetic particles: A molecular dynamics simulation
    Nucl Instrum Methods Phys Res Sect B, 1-4 (207):
  • [49] Molecular dynamics simulation of defect formation and precipitation in heavily carbon doped silicon
    Zirkelbach, F.
    Lindner, J. K. N.
    Nordlund, K.
    Stritzker, B.
    MATERIALS SCIENCE AND ENGINEERING B-ADVANCED FUNCTIONAL SOLID-STATE MATERIALS, 2009, 159-60 : 149 - 152
  • [50] A molecular dynamics study of the structural features of liquid silicon
    Glazov, VM
    Pavlova, LM
    Rezontov, KV
    ZHURNAL FIZICHESKOI KHIMII, 1997, 71 (04): : 656 - 661
12345