LIGA microstructures on top of micromachined silicon wafers used to fabricate a micro-optical switch

被引：9
|
作者：
Muller, A. [1 ]
Gottert, J. [1 ]
Mohr, J. [1 ]
机构：
[1] Institut fur Mikrostrukturtechnik, Karlsruhe, Germany
来源：
Journal of Micromechanics and Microengineering | 1993年 / 3卷 / 03期
关键词：
Actuators - Lithography - Micromachining - Microstructure - WSI circuits;
D O I：
10.1088/0960-1317/3/3/017
中图分类号：
学科分类号：
摘要：
The UGA process applied on micromachined silicon substrates offers new possibilities in microsystem technology, especially in micro-optic. UGA microstructures used as fixing elements for passive micro-optical components and optical fibres are precisely adjusted to microstructures etched into silicon wafers. In this way, optical fibres and passive micro-optical components, e.g., ball lenses having different diameters can be precisely positioned at the same optical axis, In addition, other functional elements like microactuators can be integrated on the same substrate to build advanced microsystem, e.g. a switch for use with single-mode fibres.
引用
收藏
页码：158 / 160
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