NANOTECHNOLOGY.

被引：0
|
作者：
Franks, A. [1 ]
机构：
[1] NPL, Teddington, Engl, NPL, Teddington, Engl
来源：
Journal of Physics E: Scientific Instruments | 1987年 / 20卷 / 12期
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D O I：
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学科分类号：
摘要：
PRECISION ENGINEERING
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页码：1442 / 1451
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