Characterization of filtered cathodic vacuum arc system

被引:0
|
作者
Shi, X. [1 ]
Tay, B.K. [1 ]
Flynn, D.I. [1 ]
Ye, Q. [1 ]
Sun, Z. [1 ]
机构
[1] Nanyang Technological Univ, Singapore, Singapore
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学科分类号
摘要
Vacuum deposited coatings
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页码:195 / 200
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