Structure and electrical properties of Pb(Zr,Ti)O3 thin films deposited by reactive sputtering using multi-targets

被引：0

作者：

Cho, Neung-Ho ^{[1
]}

Kim, Ho-Gi ^{[1
]}

机构：

[1] Korea Advanced Inst of Science and, Technology, Taejon, Korea, Republic of

来源：

Thin Solid Films | 1995年 / 266卷 / 02期

关键词：

Crystal quality effects - Fatigue resistance - Halogen lamp - Lead zirconate titanate thin films - Mass flow controller - Multiple-target sputtering system - Reactive sputtering - Structural properties - Turbomolecular pump;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

页码：140 / 144

共 50 条

[1] STRUCTURE AND ELECTRICAL-PROPERTIES OF PB(ZR,TI)O-3 THIN-FILMS DEPOSITED BY REACTIVE SPUTTERING USING MULTI-TARGETS
CHO, NH
KIM, HG
THIN SOLID FILMS, 1995, 266 (02) : 140 - 144
[2] GROWTH AND CHARACTERIZATION OF PB(ZR, TI)O3 FILMS DEPOSITED BY REACTIVE SPUTTERING OF METALLIC TARGETS
CROTEAU, A
SAYER, M
IEEE TRANSACTIONS ON ULTRASONICS FERROELECTRICS AND FREQUENCY CONTROL, 1986, 33 (06) : 821 - 821
[3] Preparation and switching kinetics of Pb(Zr, Ti)O3 thin films deposited by reactive sputtering
Hase, Takashi, 1600, (30):
[4] PREPARATION AND SWITCHING KINETICS OF PB(ZR, TI)O3 THIN-FILMS DEPOSITED BY REACTIVE SPUTTERING
HASE, T
SHIOSAKI, T
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1991, 30 (9B): : 2159 - 2162
[5] Structural and electrical properties of highly oriented Pb(Zr,Ti)O3 thin films deposited by facing target sputtering
Li, XS
Yamashita, K
Tanaka, T
Suzuki, Y
Okuyama, M
SENSORS AND ACTUATORS A-PHYSICAL, 2000, 82 (1-3) : 265 - 269
[6] Structure and electrical properties of RF-sputtering deposited thin ferroelectric Pb(Zr0.52Ti0.48)O3 films
Tunkasiri, T
Qin, Y
Nhuapeng, W
Thamjaree, W
JOURNAL OF MATERIALS SCIENCE LETTERS, 2000, 19 (21) : 1913 - 1916
[7] Preparation and properties of Pb(Zr, Ti)O3 thin films deposited on Ir electrodes using a sputtering apparatus
Kim, JD
Sasaki, K
Hata, T
VACUUM, 2000, 59 (2-3) : 559 - 566
[8] Structure and some properties of Pb(Zr,Ti)O3 thin films
Andreeva, AF
Kasumov, AM
POWDER METALLURGY AND METAL CERAMICS, 2002, 41 (11-12) : 564 - 566
[9] The structure and some properties of Pb(Zr,Ti)O3 thin films
Andreeva, A.F.
Kasumov, A.M.
Poroshkovaya Metallurgiya, 2002, (11-12): : 9 - 11
[10] Electrical properties of Sb-doped PZT films deposited by dc reactive sputtering using multi-targets
Choi, WY
Ahn, JH
Lee, WJ
Kim, HG
MATERIALS LETTERS, 1998, 37 (03) : 119 - 127

← 1 2 3 4 5 →