Fabrication of SiO2/Si/SiO2 double barrier diodes using two-dimensional Si structures

被引:0
|
作者
Namatsu, Hideo [1 ]
Horiguchi, Seiji [1 ]
Takahashi, Yasuo [1 ]
Nagase, Masao [1 ]
Kurihara, Kenji [1 ]
机构
[1] NTT Basic Research Lab, Kanagawa, Japan
关键词
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
页码:3669 / 3674
相关论文
共 50 条
  • [31] Si implantation in SiO2:: Stucture of Si nanocrystals and composition of SiO2 layer
    Levitcharsky, V.
    Saint-Jacques, R. G.
    Wang, Y. Q.
    Nikolova, L.
    Smirani, R.
    Ross, G. G.
    SURFACE & COATINGS TECHNOLOGY, 2007, 201 (19-20): : 8547 - 8551
  • [32] Preferential growth of Si nanocrystals in SiO2/Si/SiO2 sandwich structure
    Du, X. W.
    Li, H.
    Lu, Y. W.
    Sun, J.
    JOURNAL OF CRYSTAL GROWTH, 2007, 305 (01) : 59 - 62
  • [33] Direct observation of two-dimensional growth at SiO2/Si(111) interface
    Hojo, Daisuke
    Tokuda, Norio
    Yamabe, Kikuo
    THIN SOLID FILMS, 2007, 515 (20-21) : 7892 - 7898
  • [34] Formation mechanism of two-dimensional hexagonal silica on SiO2/ Si substrate
    Maisha, Nuzhat
    Ogunbiyi, Olugbenga
    Gao, Guanhui
    Sun, Mingyuan
    Puretzky, Alexander
    Li, Bo
    Yang, Yingchao
    JOURNAL OF CRYSTAL GROWTH, 2024, 634
  • [35] A study of proton generation in Si/SiO2/Si structures
    Girault, V
    Devine, RAB
    Warren, WL
    Vanheusden, K
    MICROELECTRONIC ENGINEERING, 1999, 48 (1-4) : 167 - 170
  • [36] RuO2/SiO2/Si and SiO2/porous Si/Si interfaces analysed by SIMS
    Cwil, Michal
    Konarski, Piotr
    Pajak, Michal
    Bieniek, Tomasz
    Kosinski, Andrzej
    Kaczorek, Krzysztof
    APPLIED SURFACE SCIENCE, 2006, 252 (19) : 7058 - 7061
  • [37] Nitrogen diffusion and accumulation at the Si/SiO2 interface in SiO2/Si3N4/SiO2 structures for nonvolatile semiconductor memories
    Saraf, M
    Edrei, R
    Shima-Edelstein, R
    Roizin, Y
    Hoffman, A
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2005, 23 (04): : 1558 - 1561
  • [38] Examination of the Si(111)-SiO2, Si(110)-SiO2, and Si(100)-SiO2 interfacial properties following rapid thermal annealing
    Hurley, PK
    O'Sullivan, BJ
    Cubaynes, FN
    Stolk, PA
    Widdershoven, FP
    Das, JH
    JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2002, 149 (03) : G194 - G197
  • [39] DEPENDENCE OF SI-SIO2 BARRIER HEIGHT ON SIO2 THICKNESS IN MOS TUNNEL STRUCTURES
    KASPRZAK, LA
    LAIBOWITZ, RB
    OHRING, M
    JOURNAL OF APPLIED PHYSICS, 1977, 48 (10) : 4281 - 4286
  • [40] Scanning tunneling microscopy investigation of the microtopography of SiO2 and Si surfaces at the Si/SiO2 interface in SIMOX structures
    Vyalykh, DV
    Fedoseenko, SI
    SEMICONDUCTORS, 1999, 33 (06) : 654 - 657