共 50 条
- [31] Si implantation in SiO2:: Stucture of Si nanocrystals and composition of SiO2 layer SURFACE & COATINGS TECHNOLOGY, 2007, 201 (19-20): : 8547 - 8551
- [37] Nitrogen diffusion and accumulation at the Si/SiO2 interface in SiO2/Si3N4/SiO2 structures for nonvolatile semiconductor memories JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2005, 23 (04): : 1558 - 1561