Energy dependence of concentration of implants and its chemical consequences

被引：0

|

作者：

Roessler, K. ^{[1
]}

Eich, G. ^{[1
]}

机构：

[1] KFA, Germany

来源：

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 1988年 / B32卷 / 1-4期

关键词：

Binary Collision Approximation - Collision Cascades - Implant Concentration - Marlowe Computer Code;

D O I：

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学科分类号：

摘要：

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页码：446 / 452

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