Energy dependence of concentration of implants and its chemical consequences

被引：0
|
作者：
Roessler, K. [1 ]
Eich, G. [1 ]
机构：
[1] KFA, Germany
来源：
Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms | 1988年 / B32卷 / 1-4期
关键词：
Binary Collision Approximation - Collision Cascades - Implant Concentration - Marlowe Computer Code;
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学科分类号：
摘要：
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页码：446 / 452
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