Large-area milky transparent conducting Al-doped ZnO films prepared by magnetron sputtering

被引:0
|
作者
机构
[1] Minami, Tadatsugu
[2] Sato, Hirotoshi
[3] Takata, Shinzo
[4] Ogawa, Norihiro
[5] Mouri, Takashi
来源
Minami, Tadatsugu | 1600年 / 31期
关键词
D O I
暂无
中图分类号
学科分类号
摘要
引用
收藏
相关论文
共 50 条
  • [31] PREPARATIONS OF ZNO-AL TRANSPARENT CONDUCTING FILMS BY DC MAGNETRON SPUTTERING
    MINAMI, T
    OOHASHI, K
    TAKATA, S
    MOURI, T
    OGAWA, N
    THIN SOLID FILMS, 1990, 193 (1-2) : 721 - 729
  • [32] Al-doped ZnO/WO3 heterostructure films prepared by magnetron sputtering for isopropanol sensors
    Wei-Xiang Gao
    Xue-Ting Chang
    Xiao-Jie Zhu
    Jun-Feng Li
    Ying-Chang Jiang
    Dong-Sheng Wang
    Chuan-Xiao Yang
    Shi-Bin Sun
    RareMetals, 2024, 43 (01) : 247 - 256
  • [33] Effect of buffer thickness on the properties of Al-doped ZnO thin films prepared by DC magnetron sputtering
    Ke Zhu
    Haibin Wang
    Faxin Xiao
    Feng Xu
    Journal of Materials Science: Materials in Electronics, 2017, 28 : 7302 - 7306
  • [34] Effect of buffer thickness on the properties of Al-doped ZnO thin films prepared by DC magnetron sputtering
    Zhu, Ke
    Wang, Haibin
    Xiao, Faxin
    Xu, Feng
    JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, 2017, 28 (10) : 7302 - 7306
  • [35] Al-doped ZnO/WO3 heterostructure films prepared by magnetron sputtering for isopropanol sensors
    Gao, Wei-Xiang
    Chang, Xue-Ting
    Zhu, Xiao-Jie
    Li, Jun-Feng
    Jiang, Ying-Chang
    Wang, Dong-Sheng
    Yang, Chuan-Xiao
    Sun, Shi-Bin
    RARE METALS, 2024, 43 (01) : 247 - 256
  • [36] Al-doped ZnO/WO3 heterostructure films prepared by magnetron sputtering for isopropanol sensors
    Wei-Xiang Gao
    Xue-Ting Chang
    Xiao-Jie Zhu
    Jun-Feng Li
    Ying-Chang Jiang
    Dong-Sheng Wang
    Chuan-Xiao Yang
    Shi-Bin Sun
    Rare Metals, 2024, 43 : 247 - 256
  • [37] Effects of substrate temperature and Zn addition on the properties of Al-doped ZnO films prepared by magnetron sputtering
    Kim, Y. H.
    Lee, K. S.
    Lee, T. S.
    Cheong, B.
    Seong, T. -Y.
    Kim, W. M.
    APPLIED SURFACE SCIENCE, 2009, 255 (16) : 7251 - 7256
  • [38] Effect of Ga Doping on Transparent and Conductive Al-Doped ZnO Films Prepared Using Magnetron Cosputtering
    Kang, Dong-Won
    Kim, Sun-Jae
    Moon, Tae-Ho
    Lee, Heon-Min
    Han, Min-Koo
    JAPANESE JOURNAL OF APPLIED PHYSICS, 2010, 49 (12)
  • [39] Transparent conductive Al and Mn doped ZnO thin films prepared by DC reactive magnetron sputtering
    Cao, HT
    Pei, ZL
    Gong, J
    Sun, C
    Huang, RF
    Wen, LS
    SURFACE & COATINGS TECHNOLOGY, 2004, 184 (01): : 84 - 92
  • [40] Effect of substrate temperature on transparent conducting Al and F co-doped ZnO thin films prepared by rf magnetron sputtering
    Wang, Fang-Hsing
    Chang, Chiao-Lu
    APPLIED SURFACE SCIENCE, 2016, 370 : 83 - 91