AlN and AlSiN films of multistructure magneto-optical disk

被引:0
|
作者
Miao, Xiangshui [1 ]
Li, Zuoyi [1 ]
Hu, Yongshi [1 ]
Lin, Gengqi [1 ]
机构
[1] Huanzhong Univ of Science and, Technology, Wuhan, China
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关键词
Corrosion prevention - Films - Magnetic disk storage - Magnetooptical effects - Sputtering;
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学科分类号
摘要
The protective films of AlN and AlSiN for magnetooptical disk have been studied. The relation between their properties and sputtering condition, as well as the corrosion protective effect were discussed, and the Kerr enhancement effect for magnetooptical media was introduced.
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页码:33 / 35
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