Characterization of excimer lasers for application to lenslet array homogenizers

被引：0

作者：

Lin, Ying ^{[1
]}

Lawrence, George N. ^{[1
]}

Buck, Jesse ^{[2
]}

机构：

[1] Applied Optics Research, 1087 Lewis River Road #217, Woodland, WA 98674, United States

[2] Cymer, Incorporated, 16710 Via Del Campo Court, San Diego, CA 92127, United States

来源：

Applied Optics | 2001年 / 40卷 / 12期

关键词：

Correlation methods - Functions - Lenses - Lighting - Spatial variables measurement;

D O I：

10.1364/ao.40.001931

中图分类号：

学科分类号：

摘要：

We investigate the best method of characterizing high-divergence lasers, such as excimer lasers, to suppress fine-scale intensity nonuniformity that is due to coherence effects of lenslet homogenizers. We show by a detailed analysis of the lenslet homogenizer that, for highest accuracy, a direct measurement of the value of the autocorrelation function should be made at the separation p of the lenslet elements, identified as the critical spatial period. We show that the commonly used characterization of lasers by the 1/e2 width of the angular divergence is not the most accurate test and may overstate or understate the effectiveness of a given laser. © 2001 Optical Society of America.

引用

页码：1931 / 1941

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