Atomic layer epitaxy

被引：0
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作者：
Niinisto, Lauri [1 ]
机构：
[1] Lab. of Inorg. and Analyt. Chemistry, Helsinki Univ. Technolgoy, FIN-02015, Espoo, Finland
来源：
Current Opinion in Solid State and Materials Science | 1998年 / 3卷 / 02期
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页码：147 / 152
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