Control of crystallinity of alkoxy-derived zirconia thin films by UV irradiation

被引：0
|
作者：
Nishizawa, Kaori [1 ]
Miki, Takeshi [1 ]
Suzuki, Kazuyuki [1 ]
Fu, Desheng [1 ]
Kato, Kazumi [1 ]
机构：
[1] National Institute of AIST, 2266-98 Anagahora, Shimoshidami, Moriyama-ku, Nagoya 463-8560, Japan
来源：
Key Engineering Materials | 2003年 / 248卷
关键词：
Alkoxy derived zirconia - Crystallinity - Low pressure mercury lamp;
D O I：
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中图分类号：
学科分类号：
摘要：
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页码：125 / 128
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