Contacts on Si1-x-yGexCy alloys: electrical properties and thermal stability

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Aubry-Fortuna, V.
Barthula, M.
Perrossier, J.-L.
Meyer, F.
Demuth, V.
Strunk, H.P.
Chaix-Pluchery, O.
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Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena | 1998年 / 16卷 / 03期
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