Reacted amorphous layers: tantalum and niobium oxides

被引：0
|
作者：
Thomas, O. [1 ]
d'Heurle, F.M. [1 ]
Charai, A. [1 ]
机构：
[1] IBM Thomas J. Watson Research Cent, United States
来源：
Philosophical Magazine B: Physics of Condensed Matter; Electronic, Optical and Magnetic Properties | 1988年 / 58卷 / 05期
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摘要：
43
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页码：529 / 538
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