COPPER'S EXPANDING ROLE IN MICROELECTRONICS.

被引：0
|
作者：
Shumay Jr., William C. [1 ]
机构：
[1] Advanced Materials & Processes,, Metals Park, OH, USA, Advanced Materials & Processes, Metals Park, OH, USA
来源：
Advanced Materials and Processes | 1987年 / 132卷 / 06期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
8
引用
收藏
页码：54 / 60
相关论文
共 50 条
  • [31] INDUSTRIAL SENSOR TECHNOLOGY ON THE WINGS OF MICROELECTRONICS.
    Guenzel, Kurt
    Kaulfersch, Helmut
    Siemens Power Engineering & Automation, 1986, 8 (03): : 108 - 113
  • [32] Award address: Applied polymer science and microelectronics.
    Willson, CG
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2004, 227 : U523 - U523
  • [33] OPTICAL PRODUCTION OF LARGE AREA PATTERNS FOR MICROELECTRONICS.
    Milne, A.D.
    Stevenson, J.T.M.
    Mackie, R.D.L.
    Nuclear Instruments and Methods, 1980, : 97 - 110
  • [34] Poly(arylether)s with trifluoromethyl substituents as low-ε-dielectrics for microelectronics.
    Maier, G
    Banerjee, S
    Schneider, JM
    Hecht, R
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 1998, 216 : U61 - U61
  • [35] Welding Aspects of Using Aluminum for Wirings in Microelectronics.
    Scheel, Wolfgang
    Schmidt, Gunter
    Thiede, Marina
    Schweisstechnik Berlin, 1983, 33 (12): : 573 - 576
  • [36] MATERIALS AND APPLICATIONS FOR THIN FILMS IN HYBRID MICROELECTRONICS.
    Zinsmeister, G.
    Electrocomponent Science and Technology, 1979, 6 (3-4): : 209 - 214
  • [37] APPROACHING CRISIS IN HIGHLY TRAINED MANPOWER FOR MICROELECTRONICS.
    Leon, B.J.
    Electric Power Research Institute, Coal Combustion Systems Division, (Report) EPRI CS, 1981, : 10 - 4
  • [38] Laser-controlled moving atomic structures for microelectronics.
    Sovetov, NM
    Nikonov, AV
    Naumova, EV
    Moskovsky, VA
    Grigoriev, DA
    LASER APPLICATIONS IN MICROELECTRONIC AND OPTOELECTRONIC MANUFACTURING II, 1997, 2991 : 274 - 284
  • [39] Dry processing in microelectronics. Towards low pressure plasma technology
    Pichot, M.
    Vacuum, 1990, 41 (4 -6 Pt2) : 895 - 898
  • [40] Alternative gate dielectrics for silicon-based microelectronics.
    Garfunkel, E
    Schulte, H
    Busch, B
    Sayan, S
    Gustafsson, T
    ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY, 2000, 219 : U560 - U560
12345