COPPER'S EXPANDING ROLE IN MICROELECTRONICS.

被引：0
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作者：
Shumay Jr., William C. [1 ]
机构：
[1] Advanced Materials & Processes,, Metals Park, OH, USA, Advanced Materials & Processes, Metals Park, OH, USA
来源：
Advanced Materials and Processes | 1987年 / 132卷 / 06期
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摘要：
8
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页码：54 / 60
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