Simulation of plasma-based ion implantation of a sawtooth target

被引：0
|
作者：
Sheridan, T.E. [1 ]
机构：
[1] West Virginia Univ, Morgantown, United States
来源：
Surface and Coatings Technology | 1997年 / 93卷 / 2-3期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：225 / 228
相关论文
共 50 条
  • [31] Methane plasma-based ion implantation of metallic and galvanically oxidized tantalum
    Flege, S.
    Baba, K.
    Hatada, R.
    Ensinger, W.
    SURFACE & COATINGS TECHNOLOGY, 2011, 206 (05): : 951 - 954
  • [32] Plasma-based ion implantation treatments under industrially relevant conditions
    Ueda, M
    Wei, R
    Reuther, H
    PARTICLE BEAMS & PLASMA INTERACTION ON MATERIALS AND ION & PLASMA SURFACE FINISHING 2004, 2005, 107 : 31 - 35
  • [33] Crystallizing Metal Compound Film on Plastics by Plasma-based Ion Implantation
    Sakudo, N.
    Ikenaga, N.
    Sakumoto, N.
    Matsui, K.
    Kishi, Y.
    Yajima, Z.
    2014 20TH INTERNATIONAL CONFERENCE ON ION IMPLANTATION TECHNOLOGY (IIT 2014), 2014,
  • [34] Two switch high voltage modulator for plasma-based ion implantation
    Yukimura, K
    Kuze, E
    Matsunaga, K
    SURFACE & COATINGS TECHNOLOGY, 2002, 156 (1-3): : 66 - 70
  • [35] Properties of SiCx film prepared with plasma-based ion implantation and deposition
    Utsumi, Takayuki
    Oka, Yoshihiro
    Suzuki, Tsuneo
    Jiang, Weihua
    Yatsuzuka, Mitsuyasu
    TRANSACTIONS OF THE MATERIALS RESEARCH SOCIETY OF JAPAN, VOL 32, NO 4, 2007, 32 (04): : 879 - 882
  • [36] Nitrogen profiles in materials implanted via plasma-based ion implantation
    Lacoste, A
    Béchu, S
    Arnal, Y
    Pelletier, J
    Vallée, C
    Gouttebaron, R
    Stoquert, JP
    SURFACE & COATINGS TECHNOLOGY, 2002, 156 (1-3): : 125 - 130
  • [37] Surface modification of silicone medical materials by plasma-based ion implantation
    Kobayashi, Tomohiro
    Yokota, Toshihiko
    Kato, Rul
    Suzuki, Yoshiaki
    Iwaki, Masaya
    Terai, Takayuki
    Takahashi, Noriyoshi
    Miyasato, Tomonori
    Ujiile, Hiroshi
    NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 2007, 257 (128-131): : 128 - 131
  • [38] Titanium nitride prepared by plasma-based titanium-ion implantation
    Yukimura, K
    Sano, M
    Maruyama, T
    Kurooka, S
    Suzuki, Y
    Chayahara, A
    Kinomura, A
    Horino, Y
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1999, 17 (02): : 840 - 844
  • [39] Efficiency of plasma-based ion implantation of radioisotopes (32P)
    Fortin, MA
    Marion, F
    Stansfield, BL
    Paynter, RW
    Sarkissian, A
    Terreault, B
    SURFACE & COATINGS TECHNOLOGY, 2005, 200 (1-4): : 996 - 999
  • [40] Structure of titanium films implanted with carbon by plasma-based ion implantation
    Ma, XX
    Sun, Y
    Wu, PL
    Xia, LF
    Yukimura, K
    SURFACE & COATINGS TECHNOLOGY, 2003, 169 : 375 - 378
12345