Extracting the oxide capacitance using inductance-capacitance-resistance meter measurement on metal-oxide-semiconductor capacitors

被引：0
|
作者：
Lee, W. [1 ]
Shin, J. [1 ]
Yang, H. [1 ]
Hwang, H. [1 ]
机构：
[1] Dept. of Materials Science and Eng., Kwangju Inst. of Science and Tech., 1, Oryong-dong, Buk-gu, Kwangju, 500-712, Korea, Republic of
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers | 2001年 / 40卷 / 9 A期
关键词：
D O I：
10.1143/jjap.40.5308
中图分类号：
学科分类号：
摘要：
MOS capacitors
引用
收藏
页码：5308 / 5309
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