Bringing MEMS pressure sensors to market-FAST

被引：0
|
作者：
Mladenovic, Dragan [1 ]
Verma, Rajan [1 ]
机构：
[1] Semiconductor Products Sector, Sensor Products Division, Motorola, 2100 E. Elliot Rd, M/D El312, Tempe, AZ 85284, United States
来源：
Sensors (Peterborough, NH) | 2001年 / 18卷 / 01期
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摘要：
8
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页码：50 / 54
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