Influence of metal impurities on lifetime

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作者
Miyazaki, Morimasa [1 ]
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[1] Silicon Technology R and D Center, Sumitomo Sitix Corporation, Kohoku-cho, Kishima-gun, Saga 849-05, Japan
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ASTM Special Technical Publication | 1998年 / 1340期
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页码:294 / 304
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