Spot growth of an electron beam with an elliptical cross section due to a space charge effect

被引：0

作者：

Yamazaki, Y. ^{[1
]}

Miyoshi, M. ^{[1
]}

机构：

[1] Toshiba Corp, Kawasaki, Japan

来源：

Optik (Jena) | 1994年 / 96卷 / 04期

关键词：

Aperture - Elliptical beams - Spot growth;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

引用

页码：184 / 186

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