SPOT GROWTH OF AN ELECTRON-BEAM WITH AN ELLIPTIC CROSS-SECTION DUE TO A SPACE-CHARGE EFFECT

被引：0
|
作者：
YAMAZAKI, Y
MIYOSHI, M
机构：
来源：
OPTIK | 1994年 / 96卷 / 04期
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中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
The spot growth due to a space charge effect is studied for an electron beam with an elliptical cross section, using the first order perturbation approximation. The spot growth on target is calculated as a function of the ratio of the aperture angles in the case when the elliptical beam is focused to the round spot on the target. The result shows that the spot growth due to a homogeneous current density reduces with increasing the ratio of the aperture angles in comparison with that for the rotational symmetric beam.
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页码：184 / 186
页数：3
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