Epitaxial AlN thin films grown on α-Al2O3 substrates by ECR dual ion beam sputtering

被引：0
|
作者：
Okano, Hiroshi [1 ]
Tanaka, Naoki [1 ]
Kobayashi, Masami [1 ]
Usuki, Tatsuro [1 ]
Shibata, Kenichi [1 ]
机构：
[1] Sanyo Electric Co, Ltd, Osaka, Japan
来源：
Japanese Journal of Applied Physics, Part 1: Regular Papers & Short Notes & Review Papers | 1995年 / 34卷 / 9 B期
关键词：
Piezoelectric materials;
D O I：
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中图分类号：
学科分类号：
摘要：
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页码：5172 / 5177
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