Electrical properties of reactively sputtered CNx films

被引：1
|
作者：
Monclus, M.A. [1 ]
Cameron, D.C. [2 ]
Chowdhurry, A.K.M.S. [1 ]
机构：
[1] Materials Processing Research Centre, Dublin City University, 9, Dublin, Ireland
[2] School of Electronic Engineering, Dublin City University, 9, Dublin, Ireland
来源：
Thin Solid Films | 1999年 / 341卷 / 01期
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页码：94 / 100
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