Hardness and stiffness of amorphous SiCxNy chemical vapor deposited coatings

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作者：
Bendeddouche, Abderrahim [1 ]
Berjoan, René [2 ]
Bêche, Eric [2 ]
Hillel, Roger [1 ]
机构：
[1] IMP-CNRS, Université de Perpignan, 66860 Perpignan cedex, France
[2] IMP-CNRS, BP 5 Odeillo, 66120 Font-Romeu, France
来源：
Surface and Coatings Technology | 1999年 / 111卷 / 2-3期
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页码：184 / 190
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