Etching of thermally grown SiO2 by NH4OH in mixture of NH4OH and H2O2 cleaning solution

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[1] Kaigawa, Hiroyuki
[2] Yamamoto, Koji
[3] Shigematsu, Yasuhiro
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Kaigawa, Hiroyuki | 1600年 / JJAP, Minato-ku, Japan卷 / 33期
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