共 50 条
- [21] Gettering of metallic impurities in low-dose SIMOX wafers REPORT OF RESEARCH CENTER OF ION BEAM TECHNOLOGY HOSEI UNIVERSITY, SUPPLEMENT NO 14, MARCH 1996, 1996, : 97 - 102
- [23] Gettering of metal impurities in silicon by fast neutron irradiation 1998 5TH INTERNATIONAL CONFERENCE ON SOLID-STATE AND INTEGRATED CIRCUIT TECHNOLOGY PROCEEDINGS, 1998, : 341 - 343
- [24] INTRINSIC GETTERING OF IRON IMPURITIES IN SILICON-WAFERS JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1991, 30 (12B): : 3580 - 3583
- [25] METALLIC IMPURITIES PRECIPITATION IN SILICON ANALES DE LA ASOCIACION QUIMICA ARGENTINA, 1982, 70 (06): : 1059 - 1067
- [26] Enhanced phosphorus gettering of impurities in multicrystalline silicon at low temperature PROCEEDINGS OF THE 4TH INTERNATIONAL CONFERENCE ON CRYSTALLINE SILICON PHOTOVOLTAICS (SILICONPV 2014), 2014, 55 : 203 - 210
- [27] Gettering characteristics of heavy metal impurities in silicon wafers with polysilicon back seal and internal gettering Jpn J Appl Phys Part 1 Regul Pap Short Note Rev Pap, 11 (6601-6606):
- [28] Gettering characteristics of heavy metal impurities in silicon wafers with polysilicon back seal and internal gettering JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 1997, 36 (11): : 6601 - 6606
- [29] Gettering of impurities in hydrogen implanted nitrogen-doped silicon GETTERING AND DEFECT ENGINEERING IN SEMICONDUCTOR TECHNOLOGY, 2004, 95-96 : 565 - 569