Low pressure plasma immersion ion implantation of silicon

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City Univ of Hong Kong, Kowloon, Hong Kong [1 ]
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IEEE Trans Plasma Sci | / 6卷 / 1661-1668期
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Number:; 7000730; Acronym:; -; Sponsor:; Number: 9040220,9040332, Acronym: RGC, UGC, Sponsor: Research Grants Council, University Grants Committee,;
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