Reactive ion etching of Pt/PZT/Pt ferroelectric thin film capacitors in high density DECR plasma

被引：0
|
作者：
LETI , Grenoble, France [1 ]
机构：
来源：
Microelectron Eng | / 1-4卷 / 45-48期
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
相关论文
共 50 条
  • [41] Effect of microstructure on reactive ion etching of sol-gel-derived PZT thin film
    Peng, S
    Xi, Y
    CERAMICS INTERNATIONAL, 2004, 30 (07) : 1215 - 1218
  • [42] Auger Spectroscopy and properties of Ir(Pt)/PZT(PZT/PT)/Ir nanosized thin-film structures
    Afanas'ev, V. P.
    Afanas'ev, P. V.
    Grekhov, I. V.
    Delimova, L. A.
    Kim, S. -P.
    Koo, J. -M.
    Mashovets, D. V.
    Pankrashkin, A. V.
    Park, Y.
    Petrov, A. A.
    Shin, S.
    PHYSICS OF THE SOLID STATE, 2006, 48 (06) : 1200 - 1204
  • [43] Auger spectroscopy and properties of Ir(Pt)/PZT(PZT/PT)/Ir nanosized thin-film structures
    V. P. Afanas’ev
    P. V. Afanas’ev
    I. V. Grekhov
    L. A. Delimova
    S. -P. Kim
    J. -M. Koo
    D. V. Mashovets
    A. V. Pankrashkin
    Y. Park
    A. A. Petrov
    S. Shin
    Physics of the Solid State, 2006, 48 : 1200 - 1204
  • [44] Reactive ion etching of Pt electrode using O2-based plasma
    Kim, HW
    Kang, CJ
    VACUUM, 2003, 71 (04) : 491 - 496
  • [45] Reactive ion etching lag on high rate oxide etching using high density plasma
    Akimoto, T
    Nanbu, H
    Ikawa, E
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1995, 13 (06): : 2390 - 2393
  • [46] Investigation On Barrier Layers Of PT/BaTiO3/PT Based Thin Film Capacitors
    Smitha, P. S.
    Babu, V. Suresh
    Asmin, M. K.
    CHEMNANOMAT, 2024, 10 (12):
  • [47] Impact of Annealing on the Relaxation Processes in Pt/SrTiO3/Pt Thin Film Capacitors
    Ouajji, H.
    Raouadi, K.
    Yangui, B.
    Guillan, J.
    ACTA PHYSICA POLONICA A, 2016, 130 (03) : 791 - 794
  • [48] Electrical properties of PZT thin film capacitors with novel Pt-Ir based electrode barriers for nonvolatile memories
    Desu, Chandra S.
    Vedula, Ramakrishna
    Lee, Kwang B.
    Desu, Seshu B.
    Materials Research Society Symposium - Proceedings, 1999, 541 : 71 - 76
  • [49] Electrical properties of PZT thin film capacitors with novel Pt-Ir based electrode barriers for nonvolatile memories
    Desu, CS
    Vedula, R
    Lee, KB
    Desu, SB
    FERROELECTRIC THIN FILMS VII, 1999, 541 : 71 - 76
  • [50] Characterization of the high density plasma etching process of CCTO thin films for the fabrication of very high density capacitors
    Altamore, C.
    Tringali, C.
    Sparta, N.
    Di Marco, S.
    Grasso, A.
    Ravesi, S.
    FUNDAMENTALS AND TECHNOLOGY OF MULTIFUNCTIONAL OXIDE THIN FILMS (SYMPOSIUM G, EMRS 2009 SPRING MEETING), 2010, 8
12345