Thin-film shape-memory alloy actuated micropumps

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Case Western Reserve Univ, Cleveland, United States [1 ]
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J Microelectromech Syst | / 2卷 / 245-251期
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Number:; DABT63-95-C0070; Acronym:; DARPA; Sponsor: Defense Advanced Research Projects Agency; -; Sponsor: Whitaker Foundation;
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