PROPERTIES AND PRODUCTION OF POWDER METALLURGICAL PVD-SOURCES.

Materials necessary to serve as sources for physical vapor deposition (PVD) are a large variety of primary metals and alloys or metal compounds or a combination of both. To achieve an optimum combination of target properties for sputtering or ion plating such as homogeneous composition, low level of detrimental impurities, low gas content, high density and minimum formation of flakes, powder metallurgy methods are specially favorable offering necessary properties and economy of production. Using molybdenum as an example of the typical powder metallurgy production by powder treatment, compaction and sintering of target materials is discussed. Relevant properties of target materials are discussed.