共 50 条
- [11] Formation of low-resistivity nickel silicide with high temperature stability from atomic-layer-deposited nickel thin film JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2006, 45 (4B): : 2975 - 2979
- [12] Silicide Formation of Atomic Layer Deposition Co Using Ti and Ru Capping Layer KOREAN JOURNAL OF MATERIALS RESEARCH, 2012, 22 (04): : 202 - 206
- [14] Optimizing the formation of nickel silicide MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY, 2004, 114 : 56 - 60
- [17] Formation of nickel hydroxide thin layer on the surface of nickel electrode Zairyo Kankyo, 2006, 12 (544-548):
- [19] Characteristics of a nickel thin film and formation of nickel silicide by using remote plasma atomic layer deposition with Ni(iPr-DAD)2 Journal of the Korean Physical Society, 2015, 66 : 821 - 827
- [20] In-situ studies of silicide formation in Ti-Ta bilayer thin films on poly-Si MAGNETIC AND ELECTRONIC FILMS-MICROSTRUCTURE, TEXTURE AND APPLICATION TO DATA STORAGE, 2002, 721 : 43 - 48