Analytical studies of nickel silicide formation through a thin Ti layer

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作者
Fenske, F. [1 ]
Schopke, A. [1 ]
Schulze, S. [1 ]
Selle, B. [1 ]
机构
[1] Hahn-Meitner-Inst Berlin, Berlin, Germany
来源
Applied Surface Science | 1996年 / 104-105卷
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摘要
26
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页码:218 / 222
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